Simulation of plasma confinement in an electron cyclotron resonance zero-B trap

TE 01 Excitation of an Electron Cyclotron Resonance Plasma Source

The uniformity of plasma generation in electron cyclotron resonance (ECR) reactors for materials processing, and the subsequent uniformity of fluxes to the substrate, are generally a function of the mode of the microwave radiation injected into the chamber. In this paper, a finite difference time domain (FDTD) simulation is used to demonstrate the consequences of exciting an ECR reactor using a...

Simulation and analysis of electron cyclotron resonance discharges

We describe in detail the method for Particle-in cell/Monte-Carlo simulation of electron cyclotron resonance (ECR) discharges. In the simulation, electric and magnetic fields are obtained by solving Maxwell equations, and electrons and ions are accelerated by solving equations of motion. We consider two different cases: (i) propagation of electromagnetic wave in the presence of a constant exter...

Plasma expansion from a dielectric electron cyclotron resonance source

The boundary conditions in an electron cyclotron resonance (ECR) source have been modified to mimic the operating conditions where current-free double-layers (DLs) have been recently measured in rf helicon plasmas. The plasma is heated or generated by the ECR at 875 G inside a dielectric source tube, and expands into a grounded diffusion chamber (terminated by a glass plate) by a rapidly decrea...

Simulations of plasma confinement in an antihydrogen trap

The three-dimensional particle-in-cell 3-D PIC simulation code WARP is used to study positron confinement in antihydrogen traps. The magnetic geometry is close to that of a UC Berkeley experiment conducted, with electrons, as part of the ALPHA collaboration W. Bertsche et al., AIP Conf. Proc. 796, 301 2005 . In order to trap antihydrogen atoms, multipole magnetic fields are added to a conventio...

Electron Cyclotron Resonance Ion Source